Reno Sub-Systems released its first all solid-state generator and RF matching system. The line was created to support customers of Reno’s Velocity™ RF Matching Networks.
According to the company, the new system is the first-ever combined EVC™ match and RF generator unit designed specifically as an integrated system, leveraging Reno’s patented Velocity RF Match and Precis™ Generator technologies.
“Developing and launching a fully integrated match and generator system is a major technological accomplishment that once again showcases Reno’s innovation and know-how,” said senior vice president, business development John Voltz, in a press release. “It is highly validating that one of our repeat customers would trust us to develop this system for their latest and most advanced process tool. Adding this new integrated product to our portfolio offers us significant growth potential as a company, and propels us quickly into the RF generator market, which is roughly twice the TAM of matching networks alone.”
The company’s electronically variable capacitator (EVC) network is a digital array that performs run-to-run matching technology for a high aspect ratio, selectively anisotropic sharp-edge plasma processing.
For more information, visit https://renosubsystems.com.
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