Boston Semi Equipment Introduces Handling of Multi-Port, Low-Pressure MEMS Sensors

November 14, 2019 Tiera Oliver

Boston Semi Equipment (BSE) announced that it has enhanced its Zeus gravity feed handlers with the capability of handling extremely low-pressure MEMS devices with multiple ports. 

The Zeus pressure MEMS stimuli include 0 to 18 inches of H2O, 0 – 3 psia vacuum, and up to 150 psi. A 70-bar stimulus is in development. The Zeus is a tri-temperature handler that can be configured with up to eight test sites. Cold temperature testing is achieved using LN2 or a BSE-designed, two-stage chiller, the MR2.

For more information, please visit: www.bostonsemiequipment.com

 

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